Effect of operation parameters on the sputtering and emission processes in radiofrequency glow discharge. A comparison with the direct-current mode
Author | Perez, C; Pereiro, R; Bordel, N; Sanz-Medel, A |
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Source | Spectrochimica acta part B-Atomic spectroscopy, 53 (11): 1541-1551 Oct 2 1998 |
ISSN | 0584-8547 |