Effect of operation parameters on the sputtering and emission processes in radiofrequency glow discharge. A comparison with the direct-current mode

Author Perez, C; Pereiro, R; Bordel, N; Sanz-Medel, A
Source Spectrochimica acta part B-Atomic spectroscopy, 53 (11): 1541-1551 Oct 2 1998
ISSN 0584-8547